Optimization of a Poly-SiGe MEMS Xylophone Bar Magnetometer based on its equivalent circuit

Rochus V., Farghaly M., Rottenberg X., Tilmans H.A.C.
IMEC, BE

Keywords: equivalent model, magnetometer, optimization, resonator

This paper presents the optimization of a poly-SiGe-based MEMS Xylophone Bar Magnetometer (XBM) using a novel characterization method based on the measurement of the forward/backward transmission gains S21/S12 of the XBM treated as a two-port network. More specifically, the optimization is performed thanks to an equivalent circuit that models the electro-magneto-mechanical behavior of the magnetometer.

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Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational & Photonics
Published: June 15, 2014
Pages: 41 - 44
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4822-5827-1