Nanotech 2014 Vol. 2
Nanotech 2014 Vol. 2
Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational & Photonics

MEMS & NEMS Devices & Applications Chapter 1

CMOS-Compatible Thermally Actuated MEMS Viscosity Sensor with Aluminum on Silicon Membrane

Authors: I. Puchades, L.F. Fuller, S.E. Lyshevski

Affilation: Rochester Institute of Technology, United States

Pages: 37 - 40

Keywords: MEMS, sensors, silicon

This paper presents viscosity measurements performed on standard commercially-calibrated oils as well as to motor oils measured on a commercial cone-and-plate viscometer. Figure 2 shows the response of the sensor, in the frequency domain, when measuring the fluid viscosity. The experimentally obtained data is compared to theoretical predictions as shown in Figure 3. Frequency correlation to viscosity was shown to be the best indicator for the range of viscosities tested with lower error (~ 5%), than that of quality factor (~ 20%). Multimedia material of results will be made available at

ISBN: 978-1-4822-5827-1
Pages: 570
Hardcopy: $209.95