Authors: J. Spencer, A. Weimer
Affilation: ALD NanoSolutions, United States
Pages: 781 - 784
Keywords: particles, atomic layer deposition, thin films, ALD, MLD, equipment
Abstract:
Atomic Layer Deposition (ALD) on particles can provide unique opportunities to control surface chemistry or create new composite materials. These techniques can create a wide variety of structures to suit many different commercial applications from batteries, catalysts, to novel pigments. Many materials can be produced at any scale needed for the application in a cost effective manner. These application developments have generated a new market for research and commercial particle ALD systems.
ISBN: 978-1-4822-0581-7
Pages: 830
Hardcopy: $209.95
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