Authors: J. Spencer, A. Weimer
Affilation: ALD NanoSolutions, United States
Pages: 781 - 784
Keywords: particles, atomic layer deposition, thin films, ALD, MLD, equipment
Atomic Layer Deposition (ALD) on particles can provide unique opportunities to control surface chemistry or create new composite materials. These techniques can create a wide variety of structures to suit many different commercial applications from batteries, catalysts, to novel pigments. Many materials can be produced at any scale needed for the application in a cost effective manner. These application developments have generated a new market for research and commercial particle ALD systems.