Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

Modeling & Simulation of Microsystems Chapter 8

Modeling and Simulation of Surface Acoustic Wave Chemical Sensors

Authors: M. Husak, A. Laposa, J. Kroutil

Affilation: Czech Technical University in Prague, Faculty of Electrical Engineering, Czech Republic

Pages: 609 - 612

Keywords: SAW, chemical sensor, simulations, wave propagation

In this paper, we present the design and modeling considerations of SAW (Surface Acoustic Wave) chemical sensors based on various structures. These sensors can be used for identifying environmental contaminants in large applications scale. Various finite element models of a Surface Acoustic Wave sensors are developed using CoventorWare and 3D transient analysis is performed on the devices to study the acoustic wave propagation and characterize the device in time and frequency domain. The effects of the various interdigital transducer (IDT) design, intermediate layer and coating structure on the propagation characteristics is also investigated. Also, we present some results obtained from the device. Results indicate that with increasing the gas concentration the wave velocity decreases and the attenuation of the wave is reduced and our methodology provides powerfull tools to tune optimal design parameters.

ISBN: 978-1-4665-6275-2
Pages: 878
Hardcopy: $209.95