Authors: M. Lim, M. Daneman
Affilation: InvenSense, United States
Pages: 168 - 171
Keywords: fabless MEMS CMOS-MEMS
InvenSense, a fabless MEMS company has successfully transferred its proprietry fabriction process has been to multiple foundries to support high volume production of multiple products. The process supports CMOS electronics integration and incorporates wafer level packaging. These advances to the state of MEMS manufacturing provides fabless MEMS companies an alternative to a costly and time consuming process development cycle and a direct path to high volume production.