Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

MEMS & NEMS Devices & Applications Chapter 3

The Fabrication and Multi-Physics Simulation of a Novel Low Power Electrothermal Bimorph Actuator

Authors: W-Z Lou, M-R Guo, Y-J Lv

Affilation: Beijing Institute of Technology, China

Pages: 239 - 242

Keywords: electrothermal bimorph actuator, low power, simulation

A novel electrothermal bimorph actuator was designed for low-power (below 300mW), quick-response (below 10ms) switching application. The research work was supported by the Funds for National Key Laboratory (9140C3605101006). Three aspects about the electrothermal bimorph actuator presents. Firstly, a structural model was established based on the design requirement. Secondly, acorrding to the existing level of the fabrication technology in domestic, the fabrication process flow of the electrothermal bimorph actuator was explained and shown in this paper; Thirdly, multi-physical coupling simulations of the electrothermal bimorph actuator were made, which prove that the device was of low power, quick response and large displacement.

ISBN: 978-1-4665-6275-2
Pages: 878
Hardcopy: $209.95

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