Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

MEMS & NEMS Devices & Applications Chapter 3

3D Electrostatic Energy Harvester

Authors: V. Janicek, M. Husak, J. Formanek, J. Jakovenko

Affilation: FEE CTU in Prague, Czech Republic

Pages: 118 - 121

Keywords: MEMS, energy harvesting, electrostatic, generator

This paper discusses the design, optimization, simulation and fabrication of 3D electrostatic MEMS energy harvester. It is one part of self-powered microsystem. It is able to work in all 3 axis which increases the efficiency. The first modal frequency of 108 Hz is really low in comparison with occupied place (only about 16 sqmm). The structure can also be reconfigured to work as a 3D accelerometer.

ISBN: 978-1-4665-6275-2
Pages: 878
Hardcopy: $209.95

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