Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

MEMS & NEMS Devices & Applications Chapter 3

Temperature and Strain Response of a Surface Acoustic Wave Sensor

Authors: W.C. Wilson, G.M. Atkinson

Affilation: NASA Langley Research Center, United States

Pages: 211 - 214

Keywords: sensors, strain, surface acoustic wave, MEMS

A new multifunctional temperature and strain sensor is being investigated. The new sensor is based upon Surface Acoustic Wave (SAW) technology on a Langasite substrate. SAW sensors can be developed that respond to changes in the measurand by changing frequency or phase singly. However, when both temperature and strain change, the effects are combined making a single measurement difficult. A common solution is to measure temperature using a second sensor. While devices such as these have been developed, none provide temperature and strain from a single device [1, 2]. We have identified a region where only a thermal response is present in the phase data for SAW devices on Langasite. The measurement of temperature alone allows us to compensate the strain measurements and achieve temperature and strain from a single device.

ISBN: 978-1-4665-6275-2
Pages: 878
Hardcopy: $209.95