Authors: J. Cho
Affilation: State Univ of New York (SUNY) at Binghamton, United States
Pages: 660 - 663
Keywords: ceramic films, nanostructure, solution, processing, ZnO, TiO2, BaTiO3
Low-temperature processing that can lead to the development of highly-functional, strain-tolerant ceramic films will offer innovative solutions for the use of ceramic thin films and coatings. Current developments in organic and flexible electronics make the low-temperature and low-cost ceramic processing even more valuable. One achievable way of processing ceramic films at low temperatures (<90˚C) is to take advantage of in-situ precipitated nanoparticles and nanostructures grown from aqueous solution. In our research efforts, we have developed a series of solution-based processing protocols that can provide a means of precisely controlling hydrolysis of metal ions in aqueous solution. Especially, this low temperature processing has shown versatility to generate various nanostructures with the aid of a seed layer and a patterned mask. The growth of low dimensional nanostructures (1-D or 2-D) in fact provides a possible way to enhance the crystallinity of the solution-prepared films that can ultimately benefit many applications such as photoelectrochemical cells and microdevices. We have thus far processed various oxide systems for barrier coatings (ZrO2, TiO2, SiO2), high-k dielectrics (TiO2, BaTiO3), engineered photoanodes for dye-sensitized solar cells (TiO2, ZnO), and low-k dielectric films (SiO2). These films can be deposited on flexible as well as rigid substrates including metallic surfaces.