Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Fabrication, Devices & Applications Chapter 5

Calibrating the AFM with Self-Calibratable MEMS: A Theoretical Study

Authors: F. Li, J.V. Clark

Affilation: Purdue University, United States

Pages: 410 - 413

Keywords: self-calibratable, MEMS, sensor, AFM, stiffness

To perform reliable scientific measurements with the atomic force microscope (AFM), it is important to calibrate the AFM cantilever. Conventional calibration methods have a 10 to 15% uncertainty, and the accuracies of such methods are unknown. These conventional techniques include the added weight method, the thermal vibration method, the layout geometry method, and the factory specification method. In this paper, we present a study on the proposed use of novel self-calibratable MEMS to calibrate AFM cantilever force, stiffness, and deflection. Our method uses self-calibratable MEMS with repeatable accuracy and quantifiable uncertainty. Our MEMS can be more easily fabricated in a simple 3-mask SOI process.

ISBN: 978-1-4398-7139-3
Pages: 854
Hardcopy: $199.95