Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Fabrication, Devices & Applications Chapter 5

Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology

Authors: P. Qu

Affilation: Oakland University, United States

Pages: 406 - 409

Keywords: MEMS, accelerometer, MetalMUMPS, fully differential

As an exploratory study, this paper presents a fully differential single-axis accelerometer fabricated using MetalMUMPS process. The unique common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. The wet releasing process of the sensor allows for high yield, good process consistency. Possible low manufacturing cost of the MEMS elements can be expected if wafer-level fabrication, package and dicing services are requested.

ISBN: 978-1-4398-7139-3
Pages: 854
Hardcopy: $199.95

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