Authors: P. Qu
Affilation: Oakland University, United States
Pages: 406 - 409
Keywords: MEMS, accelerometer, MetalMUMPS, fully differential
As an exploratory study, this paper presents a fully differential single-axis accelerometer fabricated using MetalMUMPS process. The unique common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. The wet releasing process of the sensor allows for high yield, good process consistency. Possible low manufacturing cost of the MEMS elements can be expected if wafer-level fabrication, package and dicing services are requested.