Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Fabrication, Devices & Applications Chapter 5

Control of MEMS-Technology Axial Topology MicroServos

Authors: S.E. Lyshevski

Affilation: Rochester Institute of Technology, United States

Pages: 361 - 364

Keywords: MEMS, axial topology microservos, microsystems, microactuators

Concurrent microsystems design, optimization, data-intensive analysis and hardware-software co-design of digital high-performance microelectromechanical systems (MEMS) have become major challenging themes. The major goal of this paper is to report-and-apply viable methodologies for design–and–implementation of MEMS hardware, microscale axial topology actuator developments, control system design, testing, and, characterization. We examined a miniscale servosystem with axial-topology high-torque density actuators with SmCo permanent-magnet strip arrays. This servo must guarantee high-precision with imposed requirements and specification on the dynamic performance, such as stability, robustness, settling time, overshoot, etc.

ISBN: 978-1-4398-7139-3
Pages: 854
Hardcopy: $199.95