Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Fabrication, Devices & Applications Chapter 5

Fabrication of Nano-structures of NiTi Shape Memory Films and Investigations on Size dependence of their Mechanical Properties

Authors: S.K. Sharma, S. Mohan

Affilation: Indian Institute of Science, Bangalore, India

Pages: 336 - 339

Keywords: shape memory alloys (SMA), magnetron sputtering, focused ion beam (FIB) micro-machining, scanning electron microscopy, nano-mechanical testing

Focused Ion Beam (FIB) micro-machining technique has been used to generate various nano-structures on NiTi shape memory alloy films. The fabrication and nano-mechanical investigations of the nano-structures have been included in this paper.

ISBN: 978-1-4398-7139-3
Pages: 854
Hardcopy: $199.95

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