Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Fabrication, Devices & Applications Chapter 5

An Improved Micro Injection Molding Technique for Grating Devices

Authors: H.S. Li, W.H. Hsieh, L.K.C. Au, K.C. Liu

Affilation: National Chung Cheng University, Taiwan

Pages: 333 - 335

Keywords: micro injection molding, grating, sol-gel, nanoimprint

There is a new method about grating fabrication in our submission abstract. This method can help us to fabricate micro or nano devices more easily and inexpensively. I think it is very suitable for this conference.

ISBN: 978-1-4398-7139-3
Pages: 854
Hardcopy: $199.95