Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Fabrication, Devices & Applications Chapter 5

Comparaison between PDMS and PMMA for MEMS applications

Authors: C. Benachaiba, M. Bouanini

Affilation: university of bechar, Algeria

Pages: 322 - 324

Keywords: membrane, MEMS, PDMS, PMMA, elastometer

The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications.

ISBN: 978-1-4398-7139-3
Pages: 854
Hardcopy: $199.95