Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Fabrication, Devices & Applications Chapter 5

Integration Approaches of Combining Micro and Nano Technologies
A. Rouzaud, Ph. Robert, J.-Ph. Polizzi, N. Sillon
Léti, FR

Novel Low Temperature Fabrication Method for Label-Free Electronic Sensing of Biomolecules in Nanofluidic Channels with Integrated Electrodes
T. Wynne, X.T. Huang, S. Pennathur
University of California, Santa Barbara, US

Parallel Fabrication of Single-Walled Carbon Nanotube based Piezoresistive Pressure Sensors
B.R. Burg, T. Helbling, C. Hierold, D. Poulikakos
ETH Zürich, CH

Design of a g-force meter on Si wafer, based on motor driven by photons
J. Valenzuela, S. Mil’shtein
University of Massachusetts, US

AC and DC Applications of Three-Dimensional Nano-electro-mechanical-systems
A.B. Kaul, A.R. Khan, K.G. Megerian, L. Bagge, L. Epp
Jet Propulsion Laboratory, US

Programmable MEMS-Based Silicon Timing Solutions Change the Game
M. Lutz
SiTime Corp, US

Space Applications for Wireless Sensors
W.C. Wilson, G.M. Atkinson
NASA Langley Research Center, US

Design and Fabrication of a Multi-Axis MEMS Force Sensor with Integrated Carbon Nanotube Based Piezoresistors
M.A. Cullinan, R.M. Panas, M.L. Culpepper
Massachusetts Institute of Technology, US

Tin oxide nanowire sensors for highly sensitive detection of toxic gases
A. Koeck, E. Brunet, C. Griessler, T. Maier, G. Mutinati, S. Steinhauer
AIT Austrian Institute of Technology GmbH, AT

Design, Fabrication and Characterization of Inverse Adiabatic Fiber-To-Chip Couplers
M. Araghchini, A. Khilo, C.W. Holzwarth, M.S. Dahlem, H.I. Smith, E.P. Ippen, F.X. Kärtner
Massachusetts Institute of Technology, US

Lead Frame Package of MEMS Devices using Wafer-level, Air-gap Structures
N. Fritz, R. Saha, S.A. Bidstrup Allen, P.A. Kohl
Georgia Institute of Technology, US

Fracture-induced polymeric grating structures
C.C. Lin, F. Yang, J.W. Chin, L. Sung, S. Lee
National Tsing Hua Univesity, TW

Comparaison between PDMS and PMMA for MEMS applications
C. Benachaiba, M. Bouanini
university of bechar, DZ

High-aspect-ratio deep Si etching of micro/nano scale features with SF6 /H2/ O2 plasma, in a low plasma density reactive ion etching system
Z. Sanaee, M. Poudineh, M. Mehran, S. Mohajerzadeh
University of Tehran, IR

Modularity in the Design and Volume Production of Microfluidic Devices
J. Podczerviensky, L. Levine
ALine, Inc., US

An Improved Micro Injection Molding Technique for Grating Devices
H.S. Li, W.H. Hsieh, L.K.C. Au, K.C. Liu
National Chung Cheng University, TW

Fabrication of Nano-structures of NiTi Shape Memory Films and Investigations on Size dependence of their Mechanical Properties
S.K. Sharma, S. Mohan
Indian Institute of Science, Bangalore, IN

Multi-purpose tool for checking the microfabrication products
G. De Pasquale, A. Somà
Politecnico di Torino, IT

Fabrication and analysis of MEMS test structures for residual stress measurement
A. Sharma, M. Kaur, D. Bansal, D. Kumar, K. Rangra
Central Electronics Engineering Research Institute (CEERI/ CSIR), IN

SC Cavities Fast Tuning System Based on Piezoelectric Actuators
K. Przygoda, T. Pozniak, A. Napieralski, P. Sekalski, M. Grecki
Technical University of Lodz, PL

Design and Fabrication of a Metallic MEMS Gripper Using Electro-Thermal V-Shape and Modified U-Shape Actuators
J.J. Khazaai, H. Qu, M. Shillor, L. Smith
Oakland University, US

A Pressure Sensor Array with Sensing Ragnes Tunable by Drving Frequency
Y.-T. Lai, Y.-J. Yang
National Taiwan University, TW

Control of MEMS-Technology Axial Topology MicroServos
S.E. Lyshevski
Rochester Institute of Technology, US

High Sensitivity Dielectric Filled Lamé Mode Resonator for Chemical and Biological Applications
A. Heidari, YJ. Yoon, WT. Park, J.T.M. Lin
Nanyang Technological University, SG

Comparison of Electrical performance of Symmetric Toggle Switch with different dielectric layers
K. Maninder
Central Electronics Engineering Research Institute, IN

Reconfigurable RF Front End Section of Mobile
P. Chawla, N. Saluja, K. Chawla, N. Gupta, A. Chhikara, K. Kaur, S.K. Suman
KITM,kurukshetra, IN

Gravimeter on a Chip: A Theoretical Study
F. Li, J.V. Clark
Purdue University, US

A simple and low cost method for fabrication of nanochannels using water soluble nanowires
A. Joshi
Agharkar Research Institute, IN

A Novel Silicon-based Wideband Nano Switch for RF Applications
Y.X. Yang, R. Ramer
University of New South Wales (UNSW), AU

Meander based RF MEMS capacitive switch for Mobile Front End Terminal Antenna support
P. Chawla, R. Khanna
KITM, Kurukshetra University Kurukshetra, IN

Design and Analysis of FBAR switches for RF Front-End Mobile Terminal
P. Chawla, R. Khanna
kurukshetra institute of technology and management, IN

Weak Magnetic Fields Sensing Using Soft Ferrite Nanoparticles and MEMS
S.E. Lyshevski
Rochester Institute of Technology, US

Low-cost Thin-film Transistor-based Microcantilever for Measuring Deflection
P-Y Lin, Y-J Cheng, S. Kuan, and L-S. Huang
National Tainwan University, TW

Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology
P. Qu
Oakland University, US

Calibrating the AFM with Self-Calibratable MEMS: A Theoretical Study
F. Li, J.V. Clark
Purdue University, US

Comb Finger Capacitive Micro Wind Senor
Z. Zhao, Y. Han, L. Du, Z. Fang, X. Wang
Institute of Electronics,CAS, CN

ISBN: 978-1-4398-7139-3
Pages: 854
Hardcopy: $199.95