Authors: J-C Lin, M-K Hsu, H-T Hou, J-Y Wu
Affilation: St. John’s University, Taiwan
Pages: 456 - 459
Keywords: nanoporous silicon, white-light emission, supercritical fluid technology, post-treatment
Nanoporous silicon (NPS) membrane with white-light emission property, including red, green and blue (RGB) colors by using the glucose post-treatment of supercritical fluid technology (SCF) is originally proposed in this paper. The electrochemical anodization with a vertical experimental setup is employed to prepare NPS samples, and a uniform thickness of 3.3 μm for all fabricated membranes is obtained. To clarify the influence of post-treatment on NPS samples, the scanning-electron-microscope (SEM) and photoluminescence (PL) measurements are widely used and reported in this work. Compared with conventional dipping process, the measured SEM pictures indicate that the glucose particles are successfully filled into the nanoscale pillars and pores of NPS sample without any obvious cracks by studied SCF technology. Furthermore, the strongly PL spectra of white-light emissions consisting of RGB colors under a 325 nm excitation of He-Cd laser is observed from studied NPS samples after SCF post-treatment. The obtained wavelength of intensity peaks are about 400 nm, 500 nm and 600 nm, respectively. For NPSs further application of whit-light illumination, the obtained PL-spectra of proposed method could have a great potential in related development of optoelectronics and microelectronic devices.