Authors: C-Y Chiang, Z-K Huang, K-S Chen
Affilation: National Cheng Kung University, Taiwan
Pages: 20 - 23
Keywords: nanoindentation, FEA, King model, Si3N4
The entire study includes Si3N4 specimen fabrication, material and mechanical characterization, a new physical model derivation, as well as the corresponding finite element analysis (FEA) and simulations. Nevertheless, the standard method used for nanoindentation were developed primarily for monolithic material. In this study, finite element analysis (FEA) was used to simulate the effect of residual stress on indentation test and develop an improved technique that nanoindentation will be widely applicable.