Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Devices Chapter 6

A Fully Symmetric and Completly Decoupled MEMS-SOI Gyroscope

Authors: A. Sharaf, S. Sedky, M. Serry, A. Elshurafa, M. Ashour, S.E.-D. Habib

Affilation: American University in Cairo, Egypt

Pages: 386 - 389

Keywords: micromachined gyroscope, FEA, DRIE, MEMS-SOI

Gyroscopes are sensors that measure rotation rate and are extremely important in many applications such as navigation and vehicle stability control. Despite being manufactured in many technologies in various shapes and sizes, micro-electromechanical (MEMS) gyroscopes are gaining wide acclaim due to the miniaturization advantage, and the potential of integrating the gyroscopes along with the driving and sensing circuitry on the same chip and/or package to increase yield and reduce cost. In this paper, we present a new vibratory, fully symmetric, decoupled gyroscope, along with detailed theoretical analysis. The analytical results are verified with thorough simulations using the commercially available software packages with the Coriolis force receiving particular attention.

ISBN: 978-1-4398-3402-2
Pages: 862
Hardcopy: $189.95