Authors: T. Sulzbach, W. Engl, R. Maier
Affilation: Nanoworld Services GmbH, Germany
Pages: 378 - 381
Keywords: cantilever, array, AFM, piezoresistor, actuator, tip
Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an individual tip-sample distance control which is demonstrated in parallel surface imaging experiments. The probe concept and fabrication is explained as well as the probe characteristics and first application results.