Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Devices Chapter 6

Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy

Authors: T. Sulzbach, W. Engl, R. Maier

Affilation: Nanoworld Services GmbH, Germany

Pages: 378 - 381

Keywords: cantilever, array, AFM, piezoresistor, actuator, tip

Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an individual tip-sample distance control which is demonstrated in parallel surface imaging experiments. The probe concept and fabrication is explained as well as the probe characteristics and first application results.

ISBN: 978-1-4398-3402-2
Pages: 862
Hardcopy: $189.95

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