Authors: S. Chakraborty, T.K. Bhattacharyya
Affilation: Indian Institute of Technology (IIT), Kharagpur, India
Pages: 360 - 363
Keywords: inverter, universal gate, MEMS, cantilever, electrostatic actuation, Euler Bernoulli’s Equation, sensor
This paper presents in brief the design, analysis and fabrication of surface micro-machined cantilever based binary logic inverter and universal gate for low frequency signal processing circuits in MEMS based sensors. The paper attempts to offer the flexibility of developing all-MEMS sensor system which can greatly reduce the complexities related to integration of CMOS based interfacing circuit and signal processing circuits in MEMS sensors. Therefore they can find useful application in application like electro-physiological signal processing, seismic wave sensors or spacecraft accelerometer devices where the signals range from milli-Hz to a few Hz only. The design optimization of the beams have been thoroughly carried out with analytical approach as well as with finite element method based simulation for optimal performance in the digital systems. The performance of the inverter and the universal gate have been evaluated analytically and verified with simulation. The digital systems have been fabricated using PolyMUMPs surface micro-machining technology. Thorough characterization of the devices will be performed and reported in near future.