Nanotech 2010 Vol. 2
Nanotech 2010 Vol. 2
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational

MEMS & NEMS Devices Chapter 6

Micromachined Glass-Blown 3-D Spherical Shells as Mechanical Vibratory Elements
I.P. Prikhodko, A.A. Trusov, S.A. Zotov, A.M. Shkel
University of California, Irvine, US

Carbon-based Nanoelectronic Devices for Space Applicatoins
A.B. Kaul, A.R. Khan, K.G. Megerian, P. von Allmen, L. Bagge, L. Epp, R.L. Baron
Jet Propulsion Laboratory, US

Modeling of a Surface Acoustic Wave Strain Sensor
W.C. Wilson, G.M. Atkinson
NASA Langley Research Center, US

Frequency-Interleaved MEMS Ultrasound Transducer
S-J Chen, Y. Choe, E.S. Kim
University of Southern California, US

High Fidelit Loud Microspeaker Based on PZT Bimorph Diaphragm
Y. Choe, S.J. Chen, E.S. Kim
University of Southern California, US

Mechanical Robustness of FPA in a-Si Microbolometer with Fine Pitch
H.Y. Kim, K.M. Kim, B.I. Kim, W.S. Jang, T.H. Kim, T.Y. Kang
National Nanofab Center, KR

Arrayed, Piezoelectrically-Actuated Mirrors and Gratings for Spectrometer
S-J Chen, D. Chi, J. Lo, E.S. Kim
University of Southern California, US

A MEMS-Based Wide-Band Multi-State Power Attenuator for Radio Frequency and Microwave Applications
J. Iannacci, A. Faes, F. Mastri, D. Masotti, V. Rizzoli
Fondazione Bruno Kessler - FBK, IT

Design of compact, high capacitance ratio MEMS switch for X - Band applications using high-k dielectric materials
K. Maninder

One-chip MOS Structure for Temperature Flow Sensor
M. Husak, A. Boura, J. Jakovenko
Czech Technical University in Prague, CZ

Gentle Micropump based on Microelectromagnetic Actuator
A.T. Al-Halhouli, A. Waldschik, M.I. Kilani, S. Büttgenbach
Technische Universität Braunschweig, DE

Investigation of Stress in AlN Thin Films for Piezoelectric MEMS
R.E. Sah, L. Kirste, M. Baeumler, P. Hiesinger, V. Cimalla, V. Lebedev, H. Baumann
Fraunhofer Institute for Applied Solid State Physics, DE

Preparation of functional PZT films on 6” and 8” silicon wafers by high rate sputtering
R. Dudde, D. Kaden, H.-J. Quenzer, B. Wagner
Fraunhofer ISIT, DE

Design and Control of a Zero Voltage Switching MEMS DC-DC Power Converter
S. Ghandour, G. Despesse, S. Basrour

A current controlled plasma-on-a-chip for atmospheric plasma generation
H. Park, J. Jeong, Y. Kim
Hongik University, KR

Development of Surface-micromachined Binary Logic Gate for Low Frequncy Signal Processing in MEMS based Sensor Applications
S. Chakraborty, T.K. Bhattacharyya
Indian Institute of Technology (IIT), Kharagpur, IN

Using MEMS as Self-Calibrating Force-Displacement Transducers: A Computational Study
J.V. Clark, F. Li, H. Lee, K. Kadasia
Purdue University, US

Towards Microrobots with Insect-Like Dexterity
J.V. Clark, F. Li, J.V. Clark
Purdue University, US

Nanolab System for Nanoelectronics and Sensors
A. Dimonte, D. Demarchi, P. Civera, G. Piccinini
Politecnico di Torino, IT

Triaxial Accelerometer for Placement Inside the Ear Canal
T. Kwa, G. Pender, J. Letterneau
Endevco Corporation, Meggitt Sensing Systems, US

Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy
T. Sulzbach, W. Engl, R. Maier
Nanoworld Services GmbH, DE

Flexible Micropost Arrays For Studying Traction Forces Of Vascular Smooth Muscle Cells
Q. Cheng, Z. Sun, G.A. Meininger, M. Almasri
University of Missouri, US

A Fully Symmetric and Completly Decoupled MEMS-SOI Gyroscope
A. Sharaf, S. Sedky, M. Serry, A. Elshurafa, M. Ashour, S.E.-D. Habib
American University in Cairo, EG

Nano-porous poly-silicon gated ion selective field effect transistors
N. Zehfroosh, M. Shahmohammdi, S. Mohajerzadeh
University of Tehran, IR

Design and Fabrication of the Sensor for Measuring the Human Bladder Volume
S. Lee, S. Jun, S. Kim, S. Kim, B. Choi
Sogang University, KR

ISBN: 978-1-4398-3402-2
Pages: 862
Hardcopy: $189.95