Authors: A. Kiani, K. Venkatakrishnan, B. Tan
Affilation: Ryerson University, Canada
Pages: 276 - 279
Keywords: maskless lithography, amorphous silicon, femtosecond laser
In this research, we reported a maskless lithography method by a combination of laser amorphization of silicon and wet alkaline etching. This technique can lead to a promising solution for maskless lithography because in comparison to the previous techniques, it involves less processing steps and requires simple equipment configuration. Scanning Electron Microscope (SEM), a Micro-Raman and Energy Dispersive X-ray (EDX) spectroscopy analyses were used to evaluate the quality of amorphous layer and the etching process.