Authors: S. Lewis, D. Jeanmaire, V. Haynes, L. Piccirillo
Affilation: The University of Manchester, United Kingdom
Pages: 195 - 198
Keywords: high aspect ratio, electron beam resist, lithography
The performance of a new electron beam resist called SM20L-15 for use in electron beam lithography has been investigated. It was found that the clearing dose of this resist was 1025uC/cm2. The result is that 200nm features were fabricated, producing an aspect ratio of 10:1, therefore, the proximity effects commonly seen in electron beam lithography were considerably reduced.