Nanotech 2009 Vol. 3
Nanotech 2009 Vol. 3
Nanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling

Modeling and Simulation of Micro and Nano Systems Chapter 5

An Online Tool for Simulating Electro-Thermo-Mechanical Flexures Using Distributed and Lumped Analyses

Authors: F. Li, J.V. Clark

Affilation: Purdue University, United States

Pages: 252 - 255

Keywords: electro-thermo-mechanical modeling, online software tool, FEA, lumped model analysis

We present an online software tool that enables both novices and experts to quickly and fairly accurately model and simulate an electro-thermo-mechanical microdevice. We model and simulate a MEMS thermal actuator by coupling finite element analysis (FEA) with network analysis. Commercial FEA software and SUGAR package are integrated in MATLAB for the simulation process. The simulation result is comparable to the experimental data. The thermo-mechanical part of the tool has free-access on with the support of RAPPTURE Toolkit.

ISBN: 978-1-4398-1784-1
Pages: 694
Hardcopy: $179.95