Nanotech 2008 Vol. 3
Nanotech 2008 Vol. 3
Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3

Modeling & Simulation of Microsystems Chapter 5

Vibration-Actuated Bistable Micromechanism for Microassembly

Authors: H-T Pham, D-A Wang

Affilation: National Chung Hsing University, Taiwan

Pages: 639 - 642

Keywords: bistable, micromechanism, microassembly

This paper proposes a novel method to switch a widely studied bistable micromechanism. Most researches utilize on-substrate thermomechanical actuators to actuate the fully compliant tensural bistable mechanisms, while others integrate comb-drive actuators to snap between the bistable mechanism’s stable equilibrium states. In this investigation, an external vibration is exploited to switch between the bistable states. There is no need to build any actuators on chip with this method. Simulations show a faster switching time than using thermal actuators and larger snapping distance between two stable equilibrium states constrained in the comb-drive case.

ISBN: 978-1-4200-8505-1
Pages: 940
Hardcopy: $159.95