Nanotech 2008 Vol. 3
Nanotech 2008 Vol. 3
Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3

Modeling & Simulation of Microsystems Chapter 5

Design for Manufacturing integrated with EDA Tools

Authors: U. Triltsch, S. Büttgenbach

Affilation: Technical University of Braunschweig, Germany

Pages: 569 - 572

Keywords: design for manufacturing, product model, process model, EDA, process optimization

In this paper we present a process planning and optimization tool which can be linked to commercially available EDA tools. The increasing variety of available fabrication technologies and materials for microtechnological devices make the design process more and more demanding. Engineers are no longer bound to only functional aspects of the design but also have to meet cost targets and optimize the process flow itself. We have developed a data model which can be used for product design and process design, simultaneously. This data model is accessed by the designer through a process editor [1]. This editor can also be used in fabrication to document the process results and herby guaranty that all relevant data is preserved for later use in quality management (Figure 1, left). The main advantage of the system is that arbitrary technologies can be used to build process flows, as a knowledge based validation system ensures the validity of the produced process plan before manufacturing.

ISBN: 978-1-4200-8505-1
Pages: 940
Hardcopy: $159.95

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