Authors: J. Jeon, J.-B. Lee, M.J. Kim
Affilation: The University of Texas at Dallas, United States
Pages: 190 - 193
Keywords: movable micro mobile, assembly, self-driven vehicle, 3D, FIB
We present design, fabrication, and characterization of an extremely small (20x14 µm) movable 3D micro vehicle. The micro mobile was fabricated using a combination of focused-ion-beam (FIB) for micro/nano parts production, atomic layer deposition (ALD) for friction reduction coating, and a nano manipulator for semi-automated manipulation/assembly of micro/nano parts. A micromachined magnet was used as the frame for the micro vehicle. The magnetic frame was used to move the vehicle by applied magnetic forces. The movable silicon 3D micro mobile is 20 m long 14 m wide and has 3 m diameter wheel and 400 nm diameter axle using semi-automated nano precision assembly process. The completed micro mobile was placed on a silicon wafer and it was physically pushed by a computer-controlled nano manipulator. It was clearly evident that wheels were physically rotated and the micro mobile was reliably and repeatedly driven. In order to develop self-driven micro movable vehicles, an NdFeB magnet was micromachined to form a frame for the micro mobile. The magnet-framed micro mobile was repeatedly driven by external magnetic force using manipulation of a tiny magnet attached on a nano probe. To the author’s knowledge, this is the smallest movable micro vehicles ever been reported.