Authors: A.A. Svintsov, O.V. Trofimov, S.I. Zaitsev
Affilation: IMT RAS, Russian Federation
Pages: 928 - 931
Keywords: NIL resists, viscocity, thermocuring, photocuring
Polymers of different kinds are widely used in NanoImprint Lithography. First of all it is a usage of thermoplasts in thermal NIL. In step and flash imprint lithography photo-cured polymers are used. Thermocurable polymers could be used in step and flash approach when photo-exposure is changed with short heating. Demands of high throughput in nanoimprint lithography (NIL) dictate to make glass transition temperature of polymer matter used in NIL rather low therefore an approach for measurement of viscous properties of tailored polymers should be developed. The method should allow measuring the properties at the state (films of 100-500nm) in which the polymer is intended to be used. On the other hand it would be highly desirable the method would allow characterizing polymer curing and mechanical properties of the cured polymer, which planned to use as cost-effective stamps. One more additional usage of the method could be characterization on adhesion properties of polymer surfaces before and after special treatment predicting release properties of stamps as function of temperature. The approach based on the novel nano-probe developed is presented. It allows measurement of viscosity as function of temperature for thermoplastic, thermo- and photo-curable polymers with sub-micron resolution.
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