Nanotech 2008 Vol. 1
Nanotech 2008 Vol. 1
Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization - Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1

Characterization Chapter 6

Non-destructive 3D Imaging of Nano-structures with Multi-scale X-ray Microscopy

Authors: S. Wang, S.H. Lau, A. Tkachuk, F. Druewer, H. Chang, M. Feser, W. Yun

Affilation: Xradia, Inc., United States

Pages: 822 - 825

Keywords: X-ray microscopy, nano-CT, micro-CT, tomogrpahy

X-ray microscopy offers a unique combination of large penetration depth, high resolution, and high sensitivity to elemental composition. When combined with computed tomography (CT) techniques, the full three-dimensional structure of a sample can be obtained non-destructively and often with little sample preparation. With Xradia’s high-resolution x-ray optics technology, we have pushed the imaging resolution to 40 nm in our nanoXCT system. This product has been applied to a wide range of applications including single-cell level biological microscopy, failure analysis of state-of-the-art semiconductor integrated circuits, and fuel cell development. By further integrating this high-resolution x-ray imaging system with a projection-type x-ray micro-CT system, we have developed a multi-scale x-ray CT system with variable resolution between 40 nm to 40 m, and field of view from 40 m to 40 mm. This system offers unprecedented non-destructive imaging capabilities for structures ranging from tens of nm to tens of m size scale – a “zoom” range of 1,000. Our presentation will be focused on unique capabilities provided by this novel instruments and its applications.

ISBN: 978-1-4200-8503-7
Pages: 1,118
Hardcopy: $159.95

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