Authors: G. Denison Rothrock, J. Rolland and R. Henn
Affilation: Liquidia Technologies, United States
Pages: 567 - 570
Keywords: nanopatterned film, precise replication, imprint lithography
We describe the use of a new, enabling class of materials for performing precise, nano-scale imprint lithography for patterned film replication. These low surface energy, minimally adhesive, room-temperature photocurable perfluoropolyether (PFPE) elastomers, trademarked as Liquidia’s FluorocurTM resin series, are a unique class of fluoropolymers that are liquids at room temperature that can be functionalized and cured to form transparent “Teflon®-like” elastomers. Molds made from Fluorocur materials exhibit the favorable properties of both rigid and soft materials in that they are rapidly made and disposable, yet maintain the chemical resistance and performance of rigid materials such as quartz. Liquidia’s proprietary PRINTTM technology (Pattern Replication in Non-wetting Templates) utilizes molds of these materials to create nano-scale pattern replication with sub nanometer resolution.
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