Authors: S-K Koh, J.H. Lee, Y.G. Han, J-S Cho, J.H. Joo and E.A. Kralkina
Affilation: P&I Corp., Korea
Pages: 265 - 268
Keywords: nano particles, nuclei formation, PVD, substrate rotation
A method of nanoparticle fabrication in physical vapor deposition was introduced. Metal were deposited on the powdery substrate which were stirred by rotors. Particle size and prodcuction rate of metal nano particles were controlled by types of substrate, rotation speed of the substrate and evaporation rate of the metal in order to form well distribute nano particles(1-10nm). Nucleation phenomena on the substrate is examined by SEM, TEM, XPS, UV spectra, conductivity measurment, etc. Current industrial applications, comparision with conventional methods, prodcution yield, etc. are discussed.