Nanotech 2007 Vol. 4
Nanotech 2007 Vol. 4
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 4

Nanoscale Characterization Chapter 1

Quantitative Synchrotron Grazing Incidence X-ray Scattering Analysis of Cylindrical Nanostructure in Supported Thin Films

Authors: J. Yoon, S.-Y. Yang, B. Lee, W.-C. Joo, K. Heo, J.K. Kim and M. Ree

Affilation: Pohang University of Science and Technology, Korea

Pages: 113 - 115

Keywords: grazing incidence X-ray scattering, nanotemplate, block copolymer thin film

Grazing incidence X-ray scattering (GIXS) has emerged as a powerful technique for characterizing internal structure of hin film. The X-ray beam impinges at a grazing angle onto the sample slightly above the critical angle, so that the film is still fully penetrated by Xray. Analytical solutions of GIXS atterns based on the distorted wave Born approximation have been developed to describe the complicated reflection and fraction effects, which are not found in conventional transmission X-ray scattering. Here, we attempted the quantitative analysis of the two-dimensional (2D) GIXS patterns of polystyrene-b-polymethylmethacrylate (PS-b-PMMA) diblock copolymer films deposited on silicon substrates. The analysis of the GIXS patterns with using the GIXS theory was successfully carried out,

ISBN: 1-4200-6376-6
Pages: 768
Hardcopy: $139.95

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