Keywords: DRIE, MEMS, MEMS equipment, MEMS Materials, micromachine, microsystems, MST, SOI
The global MEMS market is experiencing strong growth, driven by consumer applications, MEMS-CMOS integration, automotive applications and emerging MEMS device markets. MEMS manufacturing technology and materials are critical to the continued growth in this market. The impact of application trends on the MEMS equipment and materials markets are reviewed and these markets are quantified.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 241 - 243
Industry sector: Sensors, MEMS, Electronics
Topic: Sensors - Chemical, Physical & Bio
ISBN: 1-4200-6184-4