Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3

Sensors & MEMS Chapter 3

Global MEMS Equipment and Materials Markets and Opportunities

Authors: L. Sheet

Affilation: SEMI, United States

Pages: 241 - 243

Keywords: MEMS, microsystems, MST, micromachine, MEMS equipment, MEMS Materials, DRIE, SOI

The global MEMS market is experiencing strong growth, driven by consumer applications, MEMS-CMOS integration, automotive applications and emerging MEMS device markets. MEMS manufacturing technology and materials are critical to the continued growth in this market. The impact of application trends on the MEMS equipment and materials markets are reviewed and these markets are quantified.

ISBN: 1-4200-6184-4
Pages: 732
Hardcopy: $139.95