Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3

Sensors & MEMS Chapter 3

Transient Analysis of Snap-through Behavior of a MEMS Optical Switch

Authors: Y-Y Huang and Y-J Yang

Affilation: National Taiwan University, Taiwan

Pages: 173 - 176

Keywords: bi-stable mechanism, transient, snap-through

In this work, we present the study of the transient behaviors of the bi-stable mechanism used for a MEMS optical switch. The major part of the bi-stable mechanism consists of two constrained curved structures (the double-curved beam). As the applied force exceeds a critical value, the double-curved beam snap-through to the other stable state. We use the finite element method (FEM) to simulate both the static and transient snap-through behaviors of the bi-stable mechanism. Also, the simulated results will be compared with the measured results to study the influence of post-snap-through dynamics on the optical performance of the optical switch.

ISBN: 1-4200-6184-4
Pages: 732
Hardcopy: $139.95