Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS/NEMS: Modeling & Characterization Chapter 2

Study of Thermal Efficiency Optimization in a Twin-bubble MEMS Micro-injector

Authors: H-K Tang, F-C Tseng, W.W. Wang, I-Y Lee, C-K Lee and K. Lee

Affilation: BenQ Corporation, Taiwan

Pages: 100 - 103

Keywords: thermal efficiency, Twin-bubble, micro-injector, optimization

In this paper, the methodology of design optimization to achieve optimal thermal efficiency of a twin bubble MEMS micro-injector is reported. This twin bubble back shooting structure can reduce the problems of crosstalk and satellite droplets. We demonstrated that the SiN layer in-between the heater and the ink has dominant effect in optimizing the thermal efficiency of this structure. Besides, a SiN layer of 0.8 um in thickness is proven for good thermal efficiency as well as good printing quality. By using this simulation tool, the layer thickness effect on bubble nucleation is well illustrated and optimized to achieve heater structure design optimization.

ISBN: 1-4200-6184-4
Pages: 732
Hardcopy: $139.95