Nanotech 2007 Vol. 3
Nanotech 2007 Vol. 3
Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS/NEMS Chapter 1

Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers

Authors: M. Marzencki, S. Basrour, B. Belgacem, P. Muralt and M. Colin

Affilation: TIMA Laboratory, France

Pages: 21 - 24

Keywords: energy scavenging, piezoelectric MEMS

This paper presents a design, modelling, fabrication and experimental test results of MEMS mechanical vibration energy scavenging devices for micro power generation. There is a growing need for such structures in the field of wireless sensor networks, where increasing the autonomy of the node is a crucial issue. In our case, the transduction is performed using the piezoelectric effect and the devices are entirely made using microfabrication techniques. This is a continuation of work already presented that proposes improved devices and use of new materials

ISBN: 1-4200-6184-4
Pages: 732
Hardcopy: $139.95