MEMS/NEMS – TechConnect Briefs

Nano-structure or nano-system: opportunities and pitfalls

French P., Delft University of Technology, NL

Scaling down has revealed many new effects leading to new devices able to measure faster and more accurately than traditional devices. They also present challenges in terms of connecting to the macro-world and in reliability. [...]

MEMS Sensors for Harsh Environment Applications

Nieva P.M., University of Waterloo, CA

Micro Electro Mechanical Systems (MEMS) for harsh environment applications are becoming increasingly important. They are recognized as essential for reducing weight and volume in strategic market sectors such as automotive, aerospace, turbomachinery, oil well/logging equipment, [...]

Fabrication of a Real-Time Reactive Ion Etching Resonant Sensor Using a Low Temperature Sacrificial Polymer

Morris B.G., Joseph P.J., May G.S, Georgia Institute of Technology, US

This paper presents a sacrificial layer process using a low temperature polymer as a sacrificial material for fabricating a surface micromachined in-situ reactive ion etching (RIE) resonant sensor. The sensor monitors film thickness and etch [...]

Characterization of An Integrated 3-Axis CMOS-MEMS Accelerometer

Qu H., Fang D., Xie H., Oakland University, US

This paper reports an integrated 3-axis CMOS-MEMS accelerometer with single proof mass. Sensor design, fabrication process are introduced and detailed characterization of this small-sized accelerometer is addressed. Compared to the previously reported 3-axis accelerometers, most [...]

Piezoresistive effect in DLC Films and Silicon

Tibrewala A., Phataralaoha A., Peiner E., Bandorf R., Büttgenbach S., TU Braunschweig, DE

In this work piezoresistive effect in Diamond-like carbon (DLC) films and p-diffused strain gauges is compared for the first time. DLC films are already well known in optical coatings. Here it is integrated with silicon [...]

Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers

Marzencki M., Basrour S., Belgacem B., Muralt P., Colin M., Tima Laboratory, FR

This paper presents a design, modelling, fabrication and experimental test results of MEMS mechanical vibration energy scavenging devices for micro power generation. There is a growing need for such structures in the field of wireless [...]

Experimental results for a parametrically excited micro-ring resonator

Harish K.M., Gallacher B.J., Burdess J.S., Neasham J.A., University of Newcastle upon Tyne, UK

This paper reports experimental results for a parametrically excited micro-ring resonator. Actuation and sensing are performed electrostatically thus making the scheme suitable for many vibratory sensors. The equation of motion for the electrostatically actuated MEMS [...]

Gas fingerprinting using Carbon Nanotubes transistors arrays

Bondavalli P., Legagneux P., Pribat D., THALES, FR

The first paper showing the great potentiality of Carbon Nanotubes Field Effect transistors (CNTFET) for gas sensing applications was published in 2000. From this moment a lot of scientific teams have focused their interest on [...]

Manufacturable, Highly Responsive Nanowire Mercury Sensors

Keebaugh S., Nam W.J., Fonash S.J., The Pennsylvania State University, US

We have developed a manufacturable and highly responsive gold nanowire sensor capable of detecting ppb concentrations of mercury in air and water. The nanowire sensor exhibits a superior response compared to thin film sensors and [...]

A compact, low-power cantilever-based sensor array for chemical detection

Loui A., Ratto T.V., Wilson T.S., Mukerjee E.V., Hu Z-Y, Sulchek T.A., Hart B.R., Lawrence Livermore National Laboratory, US

A compact and low-power cantilever-based sensor array has been developed and used to detect various vapor analytes. This device employs sorptive polymers that are deposited onto piezoresistive cantilevers. We have successfully detected several organic vapors, [...]

A Silicon Ultrasonic Imager Probe for Minimally Invasive Diagnosis

Chen J.K., Chen S-Y, Cheng X., Lin P., Cheng X., Liu J-H, Chen J.K., Chen S-Y, Cheng X., Li P-C, Lin P., Liu J-H, Xerox Corp, US

This paper reports the development of a miniaturized ultrasonic transducer array for minimally invasive medical imaging. This probe shape ultrasonic transducer array is smaller than a human hair. Due to its miniature size, this array [...]

A Model for Blood Cell Transport and Separation in a Magnetophoretic Microsystem

Furlani E.P., University at Buffalo, US

We present a model for predicting the transport and separation of red and white blood cells in plasma in a magnetophoretic microsystem. The microsystem is passive and consists of an array of integrated soft-magnetic elements [...]

A down-to-earth case for autonomy in massively plural sensor systems

Newman R.M., Gaura E.I., Brusey J.P., Coventry University, UK

The role of autonomy in wireless sensor networks remains something of a controversial issue. Although most of the early work in the field, and the subsequent research agenda, has implicitly assumed the use of autonomous [...]

Microfluidics and Microacoustics for Miniature Flow Cytometry

Ravula S.K., Branch D.W., Sigman J., Clem P., Kaduchak G., Brener I., Sandia National Laboratories, US

Flow cytometry is an indispensable tool in clinical diagnostics, for example in cancer, AIDS, infectious disease outbreaks, microbiology, and others. The cost and size of existing cytometers precludes their entry into field clinics, water monitoring, [...]

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