Nanotech 2006 Vol. 3
Nanotech 2006 Vol. 3
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3

Numerical and Computational Methods Chapter 5

Influence of the Casimir force on the static and dynamic behavior of electrostatically driven micromechanical resonators

Authors: S. Stoffels, L.J. Fernández, R. Puers and H.A.C. Tilmans

Affilation: IMEC, Belgium

Pages: 499 - 502

Keywords: Casimir, resonators, MEMS

Nowadays, electrostatically driven high frequency micromechanical resonators are being developed in which the gap spacing is minimized in order to achieve sufficiently high electromechanical coupling. Typical gap spacings for resonators operated close to a GHz are in the order of 80-100 nm [1]. In this region the so called Casimir force, that until now has been neglected, may become relevant. The Casimir force is of quantum mechanical origin and is exerted between two conductive surfaces [2]; the magnitude of this force scales with the separation distance between the surfaces and has an inverse quartic dependency. In this work we investigate the influence of the Casimir force on both the static and dynamic parameters of MEM resonators.

ISBN: 0-9767985-8-1
Pages: 913
Hardcopy: $119.95