Authors: C-F. Chen
Affilation: Chung-Hua University, Taiwan
Pages: 491 - 494
Keywords: initial tension, large deflection, modified Bessel functions, sensitivity
Initial tension often arises in a typical micro-fabrication process. It has been well recognized that the magnitude of initial tension could be high enough to cause a serious degradation in structural performance such as the deflection-based pressure sensitivity. The coupled effect due to pretension and un-symmetry upon the relevant structural responses can be very important in this case. In particularly, it may be worthy of note about the associated mechanical sensitivity for such typical sensing devices undergoing a large deflection condition. To this end, the sensitivity of an isotropic un-symmetric layered micro-layered plate under initial tension is formulated analytically. von Karman large deflection plate theory for the case of a un-symmetrically layered isotropic plate was simplified, leading to a modified Bessel equation for the lateral slope. The solutions for geometrical responses were further manipulated to obtain an analytical expression for the mechanical sensitivity for a typical layered micro-sensing plate. The results for a slightly un-symmetric plate are compared to those of a singled layered case available in literature to validate the present approach. The effects of initial tension, lateral load, as well as the deviation in layer moduli are thoroughly investigated, for typical un-symmetrically layered conditions. The possible advantage and the adverse disadvantage for utilizing an un-symmetric lamination for micro-sensing plates are visualized as well.