New reference standards and artifacts for nanoscale property characterization

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This paper provides an overview of calibration artifacts being developed at NIST that will greatly aid the accurate determination of nanoscale physical properties across a broad range of applications. We focus on three proposed reference standards: a spring constant artifact for calibration of atomic force microscope cantilever stiffness, a piezoresistive force sensor for calibration of contact force in atomic force acoustic microscopy, and a torsional oscillator for the absolute measurement of thin-film magnetic moments.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: May 7, 2006
Pages: 764 - 767
Industry sector: Advanced Materials & Manufacturing
Topic: Materials Characterization & Imaging
ISBN: 0-9767985-6-5