Nanotech 2006 Vol. 1
Nanotech 2006 Vol. 1
Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1

Characterization Chapter 8

Investigation of the Deformation Mechanics in Nanoindenter Deflected Freestanding Submicron Gold Thin Films

Authors: L. Wang and B.C. Prorok

Affilation: Auburn University, United States

Pages: 760 - 763

Keywords: Thin film, Young’s modulus, Microstructure

The Membrane Deflection Experiment (MDE) was employed to perform the microscale tensile testing on freestanding thin films of various FCC metals. Process parameter adjustments and annealing were performed to modulate the film microstructure. High-resolution SEM, including electron-backscattered diffraction (EBSD), was employed to provide a crystallographic analysis including grain orientation maps of the studied films. An analysis will be presented on the effects of microstructure on the mechanical properties of thin films

ISBN: 0-9767985-6-5
Pages: 871
Hardcopy: $119.95

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