Authors: Ma. Perez and A.M. Shkel
Affilation: University of California, Irvine, United States
Pages: 557 - 560
Keywords: MEMS, composite, polymer, modeling
Composites have long been known for their ability to combine the properties of dissimilar materials to create properties ideally tailored for an application. We propose applying these features to MEMS in order to reduce the effects of a problem known to plague inertial sensors. By forming aligned composites to create structures rigid in-plane while remaining compliant along the sensitive axis of a MEMS accelerometer structure, we hope to eliminate the detrimental effects of the out-of-plane torsional (trunnion) vibrational mode. We model the dynamics of such a system and demonstrate that the use of aligned composites reduces the effects of the trunnion mode by both increasing the system’s resistance both to angular disturbances and to angular deformation excited by the sense mode due to fabrication imperfections.
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