Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS Modeling and Design Chapter 9

Elastomeric Composites to Reduce the Effects of Trunnion Mode in Inertial Devices

Authors: Ma. Perez and A.M. Shkel

Affilation: University of California, Irvine, United States

Pages: 557 - 560

Keywords: MEMS, composite, polymer, modeling

Composites have long been known for their ability to combine the properties of dissimilar materials to create properties ideally tailored for an application. We propose applying these features to MEMS in order to reduce the effects of a problem known to plague inertial sensors. By forming aligned composites to create structures rigid in-plane while remaining compliant along the sensitive axis of a MEMS accelerometer structure, we hope to eliminate the detrimental effects of the out-of-plane torsional (trunnion) vibrational mode. We model the dynamics of such a system and demonstrate that the use of aligned composites reduces the effects of the trunnion mode by both increasing the system’s resistance both to angular disturbances and to angular deformation excited by the sense mode due to fabrication imperfections.

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95