Holzer S., Hollauer Ch., Ceric H., Wagner S., Entner R., Langer E., Grasser T., Selberherr S.
Vienna University of Technology, AT
Keywords: electromigration, Interconnect, stress analysis, thermal stress, transient electro-thermal simulation, transient simulation
We introduce the combination of three-dimensional transient electro-thermal interconnect simulations for intrinsic thermo-mechanical stress problems. In order to study the development of thermal stresses we use a finite element simulator for the investigation on stresses of complex layered interconnect structures at different operating conditions. Together with the potential distribution we obtain the complete input data for accurate electromigration analysis.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Pages: 620 - 623
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9767985-2-2