Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS Modeling and Design Chapter 9

Stress Optimization of a Micromechanical Torsional Spring

Authors: T. Klose, D. Kunze, T. Sandner, H. Schenk, H. Lakner, A. Schneider and P. Schneider

Affilation: Fraunhofer IPMS, Germany

Pages: 602 - 605

Keywords: MEMS, ANSYS, MOSCITO, optimization, torsional spring

In this paper we present a method for the design of a stress-optimized, micromechanical torsional spring, used in MEMS. Our optimization approach is based on a software tool for simulator-based optimization MOSCITO, cooperating with the FEM tool ANSYS. For a specific spring geometry we are able to increase maximally possible deflection by approximately 30 percent.

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95