Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

MEMS Modeling and Design Chapter 9

Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators

Authors: M. Marzencki, S. Basrour and B. Charlot

Affilation: TIMA, France

Pages: 545 - 548

Keywords: micro power generators, piezoelectric conversion

This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a device fabricated using a specific MEMS process and with piezoelectric thin film is detailed. The simulation results will be compared with experimental data obtained using devices currently under fabrication.

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95

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