MEMS Modeling and Design Chapter 9

Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators

Authors: M. Marzencki, S. Basrour and B. Charlot

Affilation: TIMA, France

Pages: 545 - 548

Keywords: micro power generators, piezoelectric conversion

Abstract:
This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a device fabricated using a specific MEMS process and with piezoelectric thin film is detailed. The simulation results will be compared with experimental data obtained using devices currently under fabrication.

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95