MEMS Modeling and Design Chapter 9

T-CAD Environment for Multi-Material-MEMS Design

Authors: U. Triltsch, S. Büttgenbach, D. Straube and H.-J. Franke

Affilation: Technical University of Braunschweig, Germany

Pages: 541 - 544

Keywords: T-CAD, building blocks, integrated process design

Abstract:
The presented approach delivers a design tool for multi-material MEMS and can act as a system level tool with interfaces for component level analysis tools. The platform provides interfaces to different knowledge bases which either can act as source of information or as editing tools for database maintenance. The main advantage of the system is a built-in setup of a consistent process flow. Together with the reuse of ready made building blocks this leads to a decrease in development time and costs.

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95