Nanotech 2005 Vol. 3
Nanotech 2005 Vol. 3
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3

Characterization and Parameter Extraction Chapter 6

Application of MCLC Method for Estimating the Parameters of MEMS Sensors

Authors: E. Colinet, J. Juillard and L. Nicu

Affilation: SUPELEC, France

Pages: 335 - 338

Keywords: parameter extraction, identification, limit cycles, nonlinear systems

An original method for estimating the parameters of MEMS sensors is presented. It is based on the measurement of binary oscillations appearing at the system's output when a discrete-time relay feedback is used: the parameters of the system can then be deduced from the shape of these oscillations with a very good accuracy. This method is presented and demonstrated in the case of the identification of some cantilever micro-beams.

ISBN: 0-9767985-2-2
Pages: 786
Hardcopy: $109.95

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