Authors: T.P. Chen and Y. Liu
Affilation: Nanyang Technological University, Singapore
Pages: 142 - 145
Keywords: nanocrystal, XPS, annealing effect
In this work, X-ray photoelectron spectroscopy (XPS) is used to study the annealing effects on the chemical structures, depth profiling of the chemical states and core-level shifts of the Si nanocrystals in the Si-implanted SiO2 films.
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