Authors: Y-M Chen, C-K Lee and Y-J Yang
Affilation: National Taiwan University, Taiwan
Pages: 732 - 735
Keywords: piezoelectric transformer, finite-element method, power devices, MEMS
Piezoelectric transformers step up or step down input voltages by electrical/mechanical/electrical conversion. Piezoelectric transformers have been proved to be promising alternatives for magnetic transformers. Furthermore, since the fabrication technology of thin-film piezoelectric materials becomes mature, piezoelectric transformers are particularly useful for integrating with the MEMS devices that require high input voltages, such as comb drives or electrostatic switches. In order to design and optimize the MEMS piezoelectric transformer, a 3-D finite element method (FEM) piezoelectric solver is needed. Typical commercial finite element packages, such as ANSYS and ABAQUS, are capable of to analyzing piezoelectric material, but they cannot take into consideration the electric loading (the loading effect) connected on the output port of piezoelectric transformers. Since the loading effect is the one of the most important factors for power devices, we develop a 3-D FEM piezoelectric solver NTUPZE which employs a new finite-element piezoelectric formulation and is capable of accounting for various types of electric loading conditions.